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Proceedings Paper

Diagnostics of particle dynamics during deposition of optically functional thin films by laser ablation
Author(s): Tatsuo Okada; Yoshiki Nakata; Mitsuo Maeda
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Paper Abstract

We describe the diagnostics of the particle dynamics during thin film deposition and the nano-particle formation by pulsed laser ablation in a background gas. Oxidation process during the deposition of the Ce-substituted yttrium iron garnet thin films in an oxygen background gas has been investigated by the laser-induced fluorescence spectroscopy (LIF) and the ZnO nano-particle formation process has been observed by the Rayleigh scattering imaging, in order to understand the relationship between the deposition conditions and the film properties. Furthermore, in order to investigate the earlier stage of the nano-particle formation process in the ablation plume, a new imaging technique, named as re-decomposition LIF (ReD-LIF) was proposed and its signal characteristics were investigated theoretically and experimentally. It was proved that ReD-LIF can visualized the small clusters, which are difficult to be visualized by any other methods.

Paper Details

Date Published: 19 February 2003
PDF: 7 pages
Proc. SPIE 4830, Third International Symposium on Laser Precision Microfabrication, (19 February 2003); doi: 10.1117/12.486536
Show Author Affiliations
Tatsuo Okada, Kyushu Univ. (Japan)
Yoshiki Nakata, Kyushu Univ. (Japan)
Mitsuo Maeda, Kyushu Univ. (Japan)

Published in SPIE Proceedings Vol. 4830:
Third International Symposium on Laser Precision Microfabrication
Isamu Miyamoto; Kojiro F. Kobayashi; Koji Sugioka; Reinhart Poprawe; Henry Helvajian, Editor(s)

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