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Proceedings Paper

Optical anisotropy in the cubic crystal of CaF2: scaling arguments and their relation to dispersing absorption
Author(s): Martin Letz; A. Gottwald; M. Richter; Matthias Brinkmann; G. Wehrhan; Lutz Parthier
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Paper Abstract

In this paper we present arguments for understanding the phenomenon of optical anisotropy in a perfectly cubic crystal such as CaF2. To simplify the discussion we review the basic arguments which seem to preclude any optical anisotropy in a cubic crystal. We discuss the range of validity and define clear conditions for deviations of optical isotropy in cubic crystals. Length and energy scales involved in the problem of radiation-matter interaction for the DUV wavelength range around 157 nm are discussed. These scaling arguments naturally force us to focus on the role of absorption processes at higher photon energies (i.e. smaller wavelengths). Especially the role of a strong, dispersing absorption, in the case of CaF2 caused by exciton excitation, is emphasized. Recent measurements of the anisotropy of the exciton resonance in CaF2 are described and discussed in terms of the small optical anisotropy.

Paper Details

Date Published: 26 June 2003
PDF: 5 pages
Proc. SPIE 5040, Optical Microlithography XVI, (26 June 2003); doi: 10.1117/12.485467
Show Author Affiliations
Martin Letz, Schott Glas (Germany)
A. Gottwald, Physikalisch-Technische Bundesanstalt (Germany)
M. Richter, Physikalisch-Technische Bundesanstalt (Germany)
Matthias Brinkmann, Schott Glas (Germany)
G. Wehrhan, Schott Lithotec AG (Germany)
Lutz Parthier, Schott Lithotec AG (Germany)

Published in SPIE Proceedings Vol. 5040:
Optical Microlithography XVI
Anthony Yen, Editor(s)

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