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Proceedings Paper

Lithography-driven layout of logic cells for 65-nm node
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Paper Abstract

The ITRS roadmap for the 65nm technology node, targets poly gate lengths of 65nm and poly pitches between 140-180nm. In addition, contact overlaps and spacing to diffusion contacts will need to be scaled down. It is very likely that the poly layer will be printed using 193nm high NA steppers and Strong Phase Shift Technologies. Attempts to capture the effect of RET on layout by adding more constraints to the desing rules make it difficult to lay out cells using manual tools and can also lead to sub optimal designs. In this paper we describe a methodology that couples automatic cell generation with Phase shifter insertion and image simulation to allow the design space to be explored more fully.

Paper Details

Date Published: 10 July 2003
PDF: 9 pages
Proc. SPIE 5042, Design and Process Integration for Microelectronic Manufacturing, (10 July 2003); doi: 10.1117/12.485349
Show Author Affiliations
Dipankar Pramanik, Synopsys, Inc. (United States)
Michel L. Cote, Synopsys, Inc. (United States)

Published in SPIE Proceedings Vol. 5042:
Design and Process Integration for Microelectronic Manufacturing
Alexander Starikov, Editor(s)

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