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Proceedings Paper

Cost and revenue impact of advanced process control (APC) with an emphasis on run-to-run control (R2R)
Author(s): Timothy D. Stanley; Richard J. Markle; Brad Van Eck; Brian K. Cusson; Matthew A. Purdy; K. J. Stanley
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Paper Abstract

This paper takes published improvements in fabricator metrics that result from Advanced Process Control,and, applying an International SEMATECH cost model to the results, quantifies the expected economic impact. By converting the improvements in factory metrics to dollars, they can be compared. The benefits are given by equipment type, and by factory benefit mechanism. The majority of these calculations are based on Run-to-Run control.

Paper Details

Date Published: 1 July 2003
PDF: 9 pages
Proc. SPIE 5044, Advanced Process Control and Automation, (1 July 2003); doi: 10.1117/12.485316
Show Author Affiliations
Timothy D. Stanley, International SEMATECH (United States)
Richard J. Markle, Advanced Micro Devices, Inc. (United States)
Brad Van Eck, International SEMATECH (United States)
Brian K. Cusson, Advanced Micro Devices, Inc. (United States)
Matthew A. Purdy, Advanced Micro Devices, Inc. (United States)
K. J. Stanley, International SEMATECH (United States)

Published in SPIE Proceedings Vol. 5044:
Advanced Process Control and Automation
Matt Hankinson; Christopher P. Ausschnitt, Editor(s)

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