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Proceedings Paper

Diffraction method for checking the sidebar defects of a small round hole
Author(s): Vitaly G. Magurin; Vladimir Alexeevich Tarlykov
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Paper Abstract

A high-sensitive method for detection and determination of the geometrical parameters of round hole sidebar defects, based on solution of inverse problem of diffraction of laser radiation on the given hole is considered. The principle of solution is analysis of the general and fine structure of diffraction patterns by means of geometrical theory of diffraction.

Paper Details

Date Published: 29 July 2002
PDF: 8 pages
Proc. SPIE 4900, Seventh International Symposium on Laser Metrology Applied to Science, Industry, and Everyday Life, (29 July 2002);
Show Author Affiliations
Vitaly G. Magurin, St. Petersburg Institute of Fine Mechanics and Optics (Russia)
Vladimir Alexeevich Tarlykov, St. Petersburg Institute of Fine Mechanics and Optics (Russia)


Published in SPIE Proceedings Vol. 4900:
Seventh International Symposium on Laser Metrology Applied to Science, Industry, and Everyday Life
Yuri V. Chugui; Sergei N. Bagayev; Albert Weckenmann; P. Herbert Osanna, Editor(s)

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