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Proceedings Paper

Ellipsometric measurements of the optical constants of solids under impulse heating
Author(s): V. A. Shvets; Nikolay N. Mikhailov; M. V. Yakushev; E. V. Spesivtsev
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Paper Abstract

We present a novel technique for estimation of temperature dependence of optical constants from ellipsometric measurements. We suggest making measurements during short-time impulse heating using high-speed single-wavelength ellipsometer. In this way we can eliminate or reduce significantly the influence of thermal oxidation or surface decomposition on measured results. For temperature monitoring we have used a ZnTe/GaAs heterostructure with high sensitivity of ellipsometric parameters to the temperature. Our measurements show impulse-to-pulse reproducibility of the temperature well within ±5°C Using this technique we determined the temperature dependence of optical constants for mercury cadmium telluride (MCT) compounds from room temperature up to 250°C.

Paper Details

Date Published: 29 July 2002
PDF: 7 pages
Proc. SPIE 4900, Seventh International Symposium on Laser Metrology Applied to Science, Industry, and Everyday Life, (29 July 2002); doi: 10.1117/12.484591
Show Author Affiliations
V. A. Shvets, Institute of Semiconductor Physics (Russia)
Nikolay N. Mikhailov, Institute of Semiconductor Physics (Russia)
M. V. Yakushev, Institute of Semiconductor Physics (Russia)
E. V. Spesivtsev, Institute of Semiconductor Physics (Russia)


Published in SPIE Proceedings Vol. 4900:
Seventh International Symposium on Laser Metrology Applied to Science, Industry, and Everyday Life
Yuri V. Chugui; Sergei N. Bagayev; Albert Weckenmann; P. Herbert Osanna, Editor(s)

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