We propose two techniques for measuring roughness, on the basis of measurement of a phase variance of the boundary object field and on a transverse coherence function of a field, as well as the devices implementing these techniques. The techniques are based on the random phase screen (RPS) approach [1, 2], which assumes: (i) all spatial frequency components associated with the phase structure of the object contribute to the formation of the radiation field resulting from interaction of the probing beam with the object; (ii) phase variance of the object's boundary field is small, ?2?0 < 1 ; (iii) the correlation length of the RPS's inhomogeneity is larger than the wavelength, i.e. /?0 > ? .Aunique relationship is known to exist within this approach between the statistical parameters describing the object structure and associated correlation parameters of the scattered field [2].

Date Published: 29 July 2002
PDF: 7 pages
Proc. SPIE 4900, Seventh International Symposium on Laser Metrology Applied to Science, Industry, and Everyday Life, (29 July 2002);

Published in SPIE Proceedings Vol. 4900:
Seventh International Symposium on Laser Metrology Applied to Science, Industry, and Everyday Life
Yuri V. Chugui; Sergei N. Bagayev; Albert Weckenmann; P. Herbert Osanna, Editor(s)