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Proceedings Paper

Laser metallization for microelectronics and bio-applications
Author(s): Lucien Diego Laude; Konstantin Kolev; Claudio Dicara; Catherine Dupas-Bruzek
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Paper Abstract

Excimer lasers were demonstrated to be effective tools in (1) engraving ceramics and polymers, (2) changing irreversibly the surface chemistry of the irradiated material, and (3) restricting these effects to specific areas of interest. In so doing, excimer laser irradiation does open new routes to functionalizing the surface of such diverse and difficult materials, allowing them to be utilized in given applications. In this paper, it is demonstrated how the above three potentialities of excimer laser surface irradiation may be put into practice in producing application-specific metallic tracks onto either sintered ceramics or polymeric materials. To this end, the accent is deliberately put here on the photochemical aspect of this irradiation process. The latter is responsible for modifying the surface stoichiometry and/or structure of irradiated ceramics and silicone rubbers and also, of some of the solid additives which combine to polymers to form so-called thermoplastics. An important consequence of this changing surface chemistry resides in the possibility for decorating the processed surfaces with metal via an electro less technique, thus establishing the ground for a novel metallization process that is presented and examplified.

Paper Details

Date Published: 17 October 2003
PDF: 9 pages
Proc. SPIE 4977, Photon Processing in Microelectronics and Photonics II, (17 October 2003); doi: 10.1117/12.483853
Show Author Affiliations
Lucien Diego Laude, Univ. de Mons-Hainaut (Belgium)
Konstantin Kolev, Univ. de Mons-Hainaut (Belgium)
Claudio Dicara, Univ. de Mons-Hainaut (Belgium)
Catherine Dupas-Bruzek, Univ. de Mons-Hainaut (Belgium)

Published in SPIE Proceedings Vol. 4977:
Photon Processing in Microelectronics and Photonics II
Alberto Piqué; David B. Geohegan; Friedrich G. Bachmann; Koji Sugioka; Frank Träger; Jan J. Dubowski; Peter R. Herman; Willem Hoving; Kouichi Murakami; Kunihiko Washio; Jim Fieret, Editor(s)

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