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Proceedings Paper

Distortion management strategy for EPL reticle
Author(s): Hajime Yamamoto; Takashi Aoyama; Noriyuki Hirayanagi; Kazuaki Suzuki
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Paper Abstract

For position measurements of the EPL reticle, a new concept reticle holder is proposed. This holder clamps the same surface during measurement as during exposure in Nikon's EPL tool, the EB Stepper. Thus the holder reproduces the deformation caused by clamping in a metrology tool with that in the EB Stepper. Investigation by simulation is described. Furthermore, an experimental holder based on this concept was manufactured, and the deformation of a 200 mm EPL reticle was measured. The experimental results and simulation results show an advantage of this method.

Paper Details

Date Published: 16 June 2003
PDF: 8 pages
Proc. SPIE 5037, Emerging Lithographic Technologies VII, (16 June 2003); doi: 10.1117/12.483743
Show Author Affiliations
Hajime Yamamoto, Nikon Corp. (Japan)
Takashi Aoyama, Nikon Corp. (Japan)
Noriyuki Hirayanagi, Nikon Corp. (Japan)
Kazuaki Suzuki, Nikon Corp. (Japan)

Published in SPIE Proceedings Vol. 5037:
Emerging Lithographic Technologies VII
Roxann L. Engelstad, Editor(s)

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