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Proceedings Paper

Silicon micromechanical accelerometer using an optical fiber
Author(s): Tongyu Wang; Shuren Zhang
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Paper Abstract

In this paper, a new type of silicon micro-mechanical accelerometer using an optical fiber is presented. The mechanical element of the accelerometer is fabricated by an unconventional wet etching process of silicon, resulting in symmetrically suspended seismic masses with a high lateral sensitivity and very low transverse sensitivities. By forming a Fabry-Perot cavity between the seismic mass and the output of an optical fiber, the acceleration can be sensed by measuring the optical path change. The feasibility of the accelerometer is demonstrated.

Paper Details

Date Published: 10 September 2002
PDF: 3 pages
Proc. SPIE 4928, MEMS/MOEMS Technologies and Applications, (10 September 2002); doi: 10.1117/12.483183
Show Author Affiliations
Tongyu Wang, Changchun Univ. of Science and Technology (China)
Shuren Zhang, Changchun Univ. of Science and Technology (China)

Published in SPIE Proceedings Vol. 4928:
MEMS/MOEMS Technologies and Applications
Guofan Jin; John S. McKillop; Kazuhiro Hane, Editor(s)

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