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Proceedings Paper

Micromechanical variable optical attenuator based on EDM micromachining
Author(s): Zhonghui Cao; Ye Yuan; Junfeng Bao; Xiaodong Wu
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Paper Abstract

A micro-machined MEMS variable optical attenuator capable of greater than 40 dB dynamic range is described. The device consists of an electromagnetically actuated gold-coated silicon micro-mirror rotating around a 100 µm-diameter shaft and a miniature driven coil. Enabling technology is precision EDM machining and laser cutting. The attenuator is scalable to a discrete array to implement a WDM drop module of an add/drop multiplexer and allows the realization of high capacity cross-connects.

Paper Details

Date Published: 10 September 2002
PDF: 3 pages
Proc. SPIE 4928, MEMS/MOEMS Technologies and Applications, (10 September 2002); doi: 10.1117/12.483177
Show Author Affiliations
Zhonghui Cao, Zhejiang Univ. (China)
Ye Yuan, Zhejiang Univ. (China)
Junfeng Bao, Zhejiang Univ. (China)
Xiaodong Wu, Zhejiang Univ. (China)

Published in SPIE Proceedings Vol. 4928:
MEMS/MOEMS Technologies and Applications
Guofan Jin; John S. McKillop; Kazuhiro Hane, Editor(s)

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