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Proceedings Paper

Laterally driven variable capacitor for displacement measurement of microactuators
Author(s): Qingquan Liu; Qing-An Huang
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Paper Abstract

As an alternative to the visual observation method used conventionally, a new approach of sensing the displacement of suface-micromachined polysilicon actuators or microactuator arrays by the measurement of capacitance variation of the electrodes is proposed in this paper. Finite element analysis (FEA) is used to provide the relation between the lateral displacement and the capacitance. In the preliminary design, the capacitance variation is on the order of fF. In order to measure the displacement precisely, the electrode arrays are proposed. This method could be useful for testing a variety of laterally driven microactuators and arrays, including MEMDACs.

Paper Details

Date Published: 10 September 2002
PDF: 5 pages
Proc. SPIE 4928, MEMS/MOEMS Technologies and Applications, (10 September 2002); doi: 10.1117/12.483157
Show Author Affiliations
Qingquan Liu, Southeast Univ. (China)
Qing-An Huang, Southeast Univ. (China)

Published in SPIE Proceedings Vol. 4928:
MEMS/MOEMS Technologies and Applications
Guofan Jin; John S. McKillop; Kazuhiro Hane, Editor(s)

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