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Proceedings Paper

Stress analysis of silica-based arrayed waveguide grating by a finite element method
Author(s): Xiaoqing Deng; Qingqing Yang; Hongjie Wang; Xiongwei Hu; Qiming Wang
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Paper Abstract

The stress distribution in silica optical waveguides on silicon is calculated by using finite element method (FEM). The waveguides are mainly subjected to compressive stress along the x direction and the z direction, and it is accumulated near the interfaces between the core and cladding layers. The shift of central wavelegnth of silica arrayed waveguide grating on silicon-substrate with the designed wavelength and the polarization dependence are caused by the stress in the silica waveguides.

Paper Details

Date Published: 17 September 2002
PDF: 4 pages
Proc. SPIE 4918, Materials, Devices, and Systems for Display and Lighting, (17 September 2002); doi: 10.1117/12.483113
Show Author Affiliations
Xiaoqing Deng, Institute of Semiconductors (China)
Qingqing Yang, Institute of Semiconductors (China)
Hongjie Wang, Institute of Semiconductors (China)
Xiongwei Hu, Institute of Semiconductors (China)
Qiming Wang, Institute of Semiconductors (China)

Published in SPIE Proceedings Vol. 4918:
Materials, Devices, and Systems for Display and Lighting
Fuxi Gan; Ming Hsien Wu; Lionel C. Kimerling, Editor(s)

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