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Proceedings Paper

Three-dimensional microfabrication by laser-induced chemical deposition
Author(s): Libing Liu; Minghui Li; Yi Zhao; Chaoxiang Yang
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Paper Abstract

A new technique about microfabrication and Rapid Prototyping named Laser-induced Chemical Deposition based Rapid Prototyping (LCD&RP) is proposed. Laser-induced chemical deposition can further be sub-divided as vapor, solid and liquid. The Laser-induced Chemical Vapor Deposition based Rapid Prototyping (LCVD&RP) process has been used in for several years, and it has faced some critical problems in deposition rate and facility cost. To overcome these shortcomings and explore new chemical deposition methods and materials, Laser-induced Chemical Liquid Deposition based Rapid Prototyping (LCLD&RP) is based on the following experimental fact: when a laser beam expanded passes through a reflector and a lens, then the beam is focused on a substrate immerging in cold (room temperature) liquid reactant, which makes the areal substrate heated and takes place chemical reaction to deposit a solid material. By controlling the motion of laser beam and process parameters, a desired three-dimensional microstructure of deposited material can be formed through layer-by-layer scanning. According to the initial experimental results, the feasibility of LCLD&RP is discussed and demonstrated.

Paper Details

Date Published: 12 September 2002
PDF: 7 pages
Proc. SPIE 4915, Lasers in Material Processing and Manufacturing, (12 September 2002); doi: 10.1117/12.482899
Show Author Affiliations
Libing Liu, Shanghai Jiao Tong Univ. (China)
Minghui Li, Shanghai Jiao Tong Univ. (China)
Yi Zhao, Shanghai Jiao Tong Univ. (China)
Chaoxiang Yang, Shanghai Jiao Tong Univ. (China)

Published in SPIE Proceedings Vol. 4915:
Lasers in Material Processing and Manufacturing
ShuShen Deng; Tatsuo Okada; Klaus Behler; XingZong Wang, Editor(s)

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