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Proceedings Paper

Fabrication of NiTi shape-memory alloy microdevices using laser
Author(s): WeiMin Huang; Q. He; M. H. Hong; Q. Xie; Yongqing Fu; Hejun Du
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Paper Abstract

NiTi shape memory alloy thin film has been proved to be the best micro actuation mechanism due to the largest displacement and the highest actuation force as compared with other mechanisms. The combination of laser and traditional MEMS techniques might provide a better and cheaper solution for the fabrication of micro devices. In this paper, we present some preliminary results of cutting and annealing of NiTi shape memory alloy thin films using different types of lasers.

Paper Details

Date Published: 12 September 2002
PDF: 7 pages
Proc. SPIE 4915, Lasers in Material Processing and Manufacturing, (12 September 2002); doi: 10.1117/12.482892
Show Author Affiliations
WeiMin Huang, Nanyang Technological Univ. (Singapore)
Q. He, Data Storage Institute (Singapore)
M. H. Hong, Nanyang Technological Univ. (Singapore)
Q. Xie, Nanyang Technological Univ. (Singapore)
Yongqing Fu, Nanyang Technological Univ. (Singapore)
Hejun Du, Nanyang Technological Univ. (Singapore)

Published in SPIE Proceedings Vol. 4915:
Lasers in Material Processing and Manufacturing
ShuShen Deng; Tatsuo Okada; Klaus Behler; XingZong Wang, Editor(s)

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