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Proceedings Paper

Optical properties of DC arc-discharge plasma CVD diamond
Author(s): John M. Trombetta; James T. Hoggins; Paul Klocek; Tom A. McKenna
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Paper Abstract

Mid-infrared transmission and absorption in polycrystalline chemical vapor deposition (CVD) diamond films has been studied. Free-standing films were grown in a DC arc-discharge plasma torch apparatus. The intensity of a band near 3.5 micrometers , which was assigned in previous work to a C-H bond-stretching mode, correlates with the hydrogen concentration. One symmetric and one antisymmetric stretching mode were observed, with frequencies corresponding to an sp3-bonded CH2 species. In some films, the hydrogen-related absorption was reduced below 1 cm-1. A broadband at 8 micrometers scales in intensity with the 3.5-micrometers band, suggesting its association with hydrogen as well. A sharp feature at 1,330 to 1,335 cm-1 tentatively is assigned to defect-activated absorption by O((Gamma) ) phonons.

Paper Details

Date Published: 1 December 1991
PDF: 12 pages
Proc. SPIE 1534, Diamond Optics IV, (1 December 1991); doi: 10.1117/12.48282
Show Author Affiliations
John M. Trombetta, Texas Instruments Inc. (United States)
James T. Hoggins, Texas Instruments Inc. (United States)
Paul Klocek, Texas Instruments Inc. (United States)
Tom A. McKenna, Texas Instruments Inc. (United States)

Published in SPIE Proceedings Vol. 1534:
Diamond Optics IV
Albert Feldman; Sandor Holly, Editor(s)

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