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Proceedings Paper

Effects of interfacial modifications on diamond film adhesion
Author(s): Jeffrey F. DeNatale; John F. Flintoff; Alan B. Harker
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Paper Abstract

Microlithographic surface patterning has been investigated as a means of improving diamond film adhesion on noncompatible substrates. This technique produces significant improvements in film adhesion beyond identical unpatterned substrates, although sufficient film stresses can develop to induce subsurface substrate fracture. The substrate etching geometry can be chosen to simultaneously produce an antireflective surface relief.

Paper Details

Date Published: 1 December 1991
PDF: 5 pages
Proc. SPIE 1534, Diamond Optics IV, (1 December 1991); doi: 10.1117/12.48278
Show Author Affiliations
Jeffrey F. DeNatale, Rockwell International Science Ctr. (United States)
John F. Flintoff, Rockwell International Science Ctr. (United States)
Alan B. Harker, Rockwell International Science Ctr. (United States)

Published in SPIE Proceedings Vol. 1534:
Diamond Optics IV
Albert Feldman; Sandor Holly, Editor(s)

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