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Proceedings Paper

Image stepper: high-resolution image processing using distributed computing
Author(s): Volker Tympel; Roberto Witt; Shannon Layland
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Paper Abstract

A high-speed image processing has been created. Distributed computing is used to get the necessary resources. Controlling a high-resolution microscope, the image processing system grabs thousands of single images from different XYZ-positions. The system can get all available optical information from a greater microscopical structure like a complete chip on a wafer. Image pre-processing functions are used to eliminate optical effects like shading. A digital contrast enhancement is also available to get a better image quality. The scanning process can take several hours if a high-aperture objective lens is used. At the end we have a complex cluster image structure, and after the image post-processing the creation of the mosaic image can be started. The post-processing functions reduce the 3D data to 2D data. Best focus images can be defined or extended depth of focus images can be created. XY-neighboring images have overlapped areas. In two runs a correlation function define offset values. In a XY-run all available offset values define the final offset values. The result can be checked and manual changes are possible before writing the final mosaic image file.

Paper Details

Date Published: 2 June 2003
PDF: 8 pages
Proc. SPIE 5038, Metrology, Inspection, and Process Control for Microlithography XVII, (2 June 2003); doi: 10.1117/12.482639
Show Author Affiliations
Volker Tympel, JENTECH Engineering GmbH (Germany)
Roberto Witt, JENTECH Engineering GmbH (Germany)
Shannon Layland, JENTECH Engineering GmbH (Germany)

Published in SPIE Proceedings Vol. 5038:
Metrology, Inspection, and Process Control for Microlithography XVII
Daniel J. Herr, Editor(s)

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