We are developing an ultra high precision Soft X-ray telescope. The design of the telescope is a normal incident one for 13.5 nm band using Mo/Si multilayers. Two ideas are introduced. One is the optical measurement system in order to monitor the prevision of the optics system. The other is the adaptive optics system with a deformable mirror. Using an x-ray optical separation filter, we can always monitor the deformation of the optics by optical light. With this information, we can control the deformable mirror to compensate the system deformation as a closed loop system. We confirmed that the absolute precision of the wave front sensor was less than 3 nm rms. The preicison of the deformable mirror was roughly 5 nm rms. The shape of the primary mirror was an off-axis paraboloide with an effective diameter of 80mm. This primary mirror was coated by Mo/Si multilayers. The reflectivity of the primary mirror at 13.5 nm was rnaging from 30 to 50%. The x-ray optical separation filter was made from Zr with a thicknness of ~170nm. The transmission of the filter for low energy x-ray was measured and was roughly 50% at 13.5nm.

Date Published: 16 June 2003
PDF: 8 pages
Proc. SPIE 5037, Emerging Lithographic Technologies VII, (16 June 2003); doi: 10.1117/12.482338

Published in SPIE Proceedings Vol. 5037:
Emerging Lithographic Technologies VII
Roxann L. Engelstad, Editor(s)