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Proceedings Paper

Double-detector-array 3D profile inspection system
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Paper Abstract

3-D profile confocal optical microscopy is a newly developed 3-D profile metrology and has widely applied in many kinds of 3-D shape inspection fields. Present 3-D shape measurement system used in confocal optical microscopy is single point measurement. Point by point detection to finish a 3-D profile inspection is considered a time consuming method and isn't suitable for large area measurement especially for high resolution measurement. This paper elaborated on a fiber-array confocal 3-D imaging system to improve measuring speed. In confocal measurement system, light source acts an important effect on system accuracy and repeatability. Light source fluctuation can cause a large error for high resolution 3-D shape measurement. This paper presents a novel system construction to solve the problem of light source fluctuation. The system design is compact and the construction is reasonable.

Paper Details

Date Published: 4 September 2002
PDF: 8 pages
Proc. SPIE 4768, Novel Optical Systems Design and Optimization V, (4 September 2002); doi: 10.1117/12.482184
Show Author Affiliations
Chongxiang Li, Nanyang Technological Univ. (Singapore)
Zhong Ping Fang, Gintic IMT (Singapore)
Anand Krishna Asundi, Nanyang Technological Univ. (Singapore)

Published in SPIE Proceedings Vol. 4768:
Novel Optical Systems Design and Optimization V
Jose M. Sasian; R. John Koshel, Editor(s)

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