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Proceedings Paper

Light source fluctuation effect on confocal imaging system
Author(s): Anand Krishna Asundi; Chongxiang Li; Yanfeng Zhang; Zhong Ping Fang
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Paper Abstract

Confocal 3-D imaging technique is a newly developed technique and widely used in many fields of research and development. It is to utilize light intensity sensitive measuring technique. Confocal 3-D profile measurement system is widely used in high resolution inspection. For high precision 3-D imaging inspection in confocal measuring system, light source acts a very important role in system resolution and accuracy. In order to improve measuring repeatability and stability, to reduce measurement error, and to lower the light source stability requirement and cost, this paper studied light source fluctuation effect to confocal imaging measurement; deduced depth response model function; analyzed system error caused by light source fluctuation; and presented a new scheme to reduce the affection of light source fluctuation. Theoretical analysis and experiment result verified that light source fluctuation should be considered and eliminated in very high resolution confocal 3-D shape measurement system.

Paper Details

Date Published: 4 September 2002
PDF: 7 pages
Proc. SPIE 4768, Novel Optical Systems Design and Optimization V, (4 September 2002); doi: 10.1117/12.482183
Show Author Affiliations
Anand Krishna Asundi, Nanyang Technological Univ. (Singapore)
Chongxiang Li, Nanyang Technological Univ. (Singapore)
Yanfeng Zhang, Tianjin Univ. (China)
Zhong Ping Fang, Gintic IMT (Singapore)

Published in SPIE Proceedings Vol. 4768:
Novel Optical Systems Design and Optimization V
Jose M. Sasian; R. John Koshel, Editor(s)

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