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Proceedings Paper

Excimer laser polymer ablation: the first twenty years
Author(s): Peter E. Dyer
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Paper Abstract

Excimer laser polymer ablation has been an active field of research and development for some twenty years now. We briefly review basic mechanistic aspects of the interaction, practical considerations related to polymer processing by ablation and applications in micromachining.

Paper Details

Date Published: 13 September 2002
PDF: 9 pages
Proc. SPIE 4760, High-Power Laser Ablation IV, (13 September 2002); doi: 10.1117/12.482126
Show Author Affiliations
Peter E. Dyer, Univ. of Hull (United Kingdom)

Published in SPIE Proceedings Vol. 4760:
High-Power Laser Ablation IV
Claude R. Phipps, Editor(s)

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