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Proceedings Paper

New techniques for laser micromachining MEMS devices
Author(s): Charles Abbott; Ric M. Allott; Bob Bann; Karl L. Boehlen; Malcolm C. Gower; Phil T. Rumsby; Ines Stassen Boehlen; Neil Sykes
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Paper Abstract

Two new laser mask projection techniques Synchronized Image Scanning (SIS) and Bow Tie Scanning (BTS) have been developed for the efficient fabrication of dense arrays of repeating 3D microstructures on large area substrates. Details of these techniques are given and examples of key industrial applications are shown.

Paper Details

Date Published: 13 September 2002
PDF: 8 pages
Proc. SPIE 4760, High-Power Laser Ablation IV, (13 September 2002); doi: 10.1117/12.482096
Show Author Affiliations
Charles Abbott, Exitech Ltd. (United Kingdom)
Ric M. Allott, Exitech Ltd. (United Kingdom)
Bob Bann, Exitech Inc. (United Kingdom)
Karl L. Boehlen, Exitech Ltd. (United Kingdom)
Malcolm C. Gower, Exitech Ltd. (United Kingdom)
Phil T. Rumsby, Exitech Ltd. (United Kingdom)
Ines Stassen Boehlen, Exitech Ltd. (United Kingdom)
Neil Sykes, Exitech Ltd. (United Kingdom)

Published in SPIE Proceedings Vol. 4760:
High-Power Laser Ablation IV
Claude R. Phipps, Editor(s)

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