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Proceedings Paper

Generation and manipulation of nanostructures by pulsed-laser ablation
Author(s): Anthony J. Pedraza; Jason D. Fowlkes; Yingfeng Guan
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Paper Abstract

Laser-induced surface structuring of silicon was studied using fluences close to the metering threshold and He gas background atmosphere. The effects of an initial surface microstructured region and of light polarization on the evolution of the surface topography were investigated. The microstructured surface topology consisted of an array of microholes surround by microcones of 2-3 micrometers tip-diameter and over 20 micrometers high. Pulsed laser irradiation of laser- microstructured silicon induces the formation of nanostructures. Nanocolumns having a diameter of 100 to 200 nm and reaching a height of up to 3 micrometers upon cumulative laser pulses grow on top of every microcone. The mechanisms of nanocolumn origin and growth are analyzed. Periodic undulations approximately 10 nm-high are formed when flat silicon substrates are irradiated with polarized laser light. These periodic structures have a wavelength that is a function of the light wavelength and the angle of incidence of the laser beam. At a slightly higher laser fluence, approximately 30 nm-diameter nanoparticles form on the surface of laser irradiated flat silicon specimens. Linear arrays of silicon nanoparticles with fairly uniform size that extend up to a millimeter are formed if the irradiation is performed using polarized light or the irradiated area contains a microstructured region. These nanostructures are analyzed within the frame of the theory of laser induced surface periodic structures.

Paper Details

Date Published: 13 September 2002
PDF: 11 pages
Proc. SPIE 4760, High-Power Laser Ablation IV, (13 September 2002); doi: 10.1117/12.482084
Show Author Affiliations
Anthony J. Pedraza, Univ. of Tennessee/Knoxville (United States)
Jason D. Fowlkes, Univ. of Tennessee/Knoxville (United States)
Yingfeng Guan, Univ. of Tennessee/Knoxville (United States)

Published in SPIE Proceedings Vol. 4760:
High-Power Laser Ablation IV
Claude R. Phipps, Editor(s)

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