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Proceedings Paper

Interaction of VUV F2 laser radiation with glasses
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Paper Abstract

The 157nm F2 laser wavelength is strongly absorbed by glasses, even those with high silica content, making it potentially well suited for machining these materials by ablation. This is of interest for fabricating micro-optics and micro-devices in glass, provided crack-free surfaces with minimal laser-induced stress and surface roughness can be produced. Experimental studies are reported on the ablation threshold, ablation rate and surface quality of N-BK7 and soda lime glass for exposure with the VUV F2 laser. Optical probe techniques and etching are employed to determine the ablation threshold and removal rate and scanning electron microscopy to assess the surface quality of the glass following laser exposure. The interaction is discussed within the framework of a thermal vaporization model and the surface thermal loading is used to make a preliminary assessment of resolution attainable in micro-feature definition.

Paper Details

Date Published: 13 September 2002
PDF: 10 pages
Proc. SPIE 4760, High-Power Laser Ablation IV, (13 September 2002); doi: 10.1117/12.482072
Show Author Affiliations
Peter E. Dyer, Univ. of Hull (United Kingdom)
Saher M. Maswadi, Univ. of Hull (United Kingdom)
Christopher D. Walton, Univ. of Hull (United Kingdom)

Published in SPIE Proceedings Vol. 4760:
High-Power Laser Ablation IV
Claude R. Phipps, Editor(s)

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