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Proceedings Paper

Improvement and application of scanning near-field optical microscope based on a piezoelectric bimorph shear force beam
Author(s): Tao Chen; Shuo Shi; Jialin Sun; Xiaojing Tan; Guangyan Tian; Yang Cao; Jihua Guo
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Paper Abstract

A non-optical shear-force detection method to control the probe-simple distance for a scanning near field optical microscope (SNOM) is proposed. A rectangular piezoelectric bimorph beam is designed so that one piezo layer of the beam is used for vibrating the scanning probe and the other for detecting the vibration. Optical fiber probe is attached on one side ofthe beam to detect the shear force. When the beam is excited at resonance by the stimulation piezo layer, the other detecting layer can generate a maximum piezo voltage. The amplitude ofthe piezo voltage will decrease as the fiber tip gets close to the sample because ofthe shear force interaction experienced by the tip. The oscillating amplitude change, picked up from the detecting piezo layer, severe as feedback and shear force imaging signal. Shear force topographic and optical images of mother disc of compact disk and multicomponent compounds (Rb0 5Cs0.5Ag4I5) thin films have been taken. The results show that the improved system is easy-to-use and fit for study thin films.

Paper Details

Date Published: 5 September 2002
PDF: 5 pages
Proc. SPIE 4923, Nano-Optics and Nano-Structures, (5 September 2002); doi: 10.1117/12.481703
Show Author Affiliations
Tao Chen, Tsinghua Univ. (China)
Shuo Shi, Tsinghua Univ. (China)
Jialin Sun, Tsinghua Univ. (China)
Xiaojing Tan, Tsinghua Univ. (China)
Guangyan Tian, Tsinghua Univ. (China)
Yang Cao, Tsinghua Univ. (China)
Jihua Guo, Tsinghua Univ. (China)

Published in SPIE Proceedings Vol. 4923:
Nano-Optics and Nano-Structures
Xing Zhu; Stephen Y. Chou; Yasuhiko Arakawa, Editor(s)

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