Proceedings Paper
Thermo-optic dispersion properties of aluminum nitride with an optical waveguide technique| Format | Member Price | Non-Member Price |
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Paper Abstract
An aluminum nitride thin film on sapphire substrate was prepared by metal-organic chemical-vapor deposition for optical waveguide study. In order to investigate thermo-optic dispersion properties of aluminum nitride waveguide, a new experimental arrangement is designed. The thermo-optic properties of thin film are obtained using a prism coupled waveguide devices, which has auto-temperature controlling system. The temperature range is 30 ° C — 85° C with the control accuracy of ± 1 ° C. The experiment was carried out by using different light source with wavelength of 441.6 nm, 514.5 nm, and 632.8nm. A set of curve of thermo-optic dispersion of aluminum nitride film is given.
Paper Details
Date Published: 28 August 2002
PDF: 4 pages
Proc. SPIE 4904, Optical Fiber and Planar Waveguide Technology II, (28 August 2002); doi: 10.1117/12.481263
Published in SPIE Proceedings Vol. 4904:
Optical Fiber and Planar Waveguide Technology II
Shuisheng Jian; Steven Shen; Katsunari Okamoto, Editor(s)
PDF: 4 pages
Proc. SPIE 4904, Optical Fiber and Planar Waveguide Technology II, (28 August 2002); doi: 10.1117/12.481263
Show Author Affiliations
Yifang Yuan, Univ. of Shanghai for Science and Technology (China)
Qiyang Zhu, Univ. of Shanghai for Science and Technology (China)
Baoxue Chen, Univ. of Shanghai for Science and Technology (China)
Qiyang Zhu, Univ. of Shanghai for Science and Technology (China)
Baoxue Chen, Univ. of Shanghai for Science and Technology (China)
Changsong Fu, Univ. of Shanghai for Science and Technology (China)
Ping Li, Univ. of Shanghai for Science and Technology (China)
Ping Li, Univ. of Shanghai for Science and Technology (China)
Published in SPIE Proceedings Vol. 4904:
Optical Fiber and Planar Waveguide Technology II
Shuisheng Jian; Steven Shen; Katsunari Okamoto, Editor(s)
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