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Proceedings Paper

System approach to MEMS commercialization
Author(s): Vladimir Vaganov
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Paper Abstract

The system approach considers a priori the interdependence of all technologies integrated into a MEMS product. Parallel development of these technologies and enabling wafer-level batch manufacturing through process integration is key to successful product development and meaningful cost reduction.

Paper Details

Date Published: 23 August 2002
PDF: 6 pages
Proc. SPIE 4906, Optical Components and Transmission Systems, (23 August 2002); doi: 10.1117/12.480619
Show Author Affiliations
Vladimir Vaganov, MegaSense Inc. (United States)

Published in SPIE Proceedings Vol. 4906:
Optical Components and Transmission Systems
WeiSheng Hu; Shoichi Sudo; Peter Kaiser, Editor(s)

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