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Proceedings Paper

Generation and application of opto-mechancial microstructures on glass
Author(s): Volker Schmidt; Winfried Arens; Ulrich Kriems
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Paper Abstract

Microstructures on glass surfaces achieved an increasing relevance in industry and research during the last years. They are used to add various optical and/or mechanical functionalities to surfaces of glass components. Important mechanical functionalities are e.g. the anti-sticking behaviour of nanostructures or the generation of micro cavities. Reduced reflectivity and the addition of diffractive optical power with negative dispersion are examples of relevant optical functionalities which can be supplemented. The authors evaluated theoretically and experimentally different promising technologies for generating such structures. Especially there was tested the compression moulding replication process, the deep drawing of glass, etching and sandblasting. All these methods are able to generate microstructures and show characteristic advantages and disadvantages. Ion beam etching allows the smallest structures but is relatively expensive. Furthermore, the ion beam etching can be used for a large variety of materials. Sandblasting is a very effective way of generating deep structures, but is limited in feature size. Wet chemical etching is suitable for small structures but not able to achieve high aspect ratios in glass. The deep drawing of glass presents a very cost efficient way for generating microstructures in volume production. Here the disadvantage is the limited feature size and aspect ratio that can be generated. Utilizing its different advantages, applications are developed by the authors for all three technologies. These are applications to be used in sensors, displays and in the semiconductor industry.

Paper Details

Date Published: 15 January 2003
PDF: 6 pages
Proc. SPIE 4979, Micromachining and Microfabrication Process Technology VIII, (15 January 2003); doi: 10.1117/12.479559
Show Author Affiliations
Volker Schmidt, Berliner Glas KGaA (Germany)
Winfried Arens, Berliner Glas KGaA (Germany)
Ulrich Kriems, Berliner Glas KGaA (Germany)

Published in SPIE Proceedings Vol. 4979:
Micromachining and Microfabrication Process Technology VIII
John A. Yasaitis; Mary Ann Perez-Maher; Jean Michel Karam, Editor(s)

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