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Proceedings Paper

Laser-promoted nanostructure evolution and nanoparticle alignment
Author(s): Anthony J. Pedraza; Jason D Fowlkes; Stephen Jesse; Yingfeng Guan
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Paper Abstract

A cone microstructure has been used as a template to generate nanotips and to promote nanoparticle alignment. A quasi-periodic array of nanotips is produced when the laser-induced cone microstructure is subject to chemical etching due to tapering of the cone tips. Nanoparticles can be produced on the surface of a silicon specimen by irradiating it in the presence of an inert gas atmosphere. The backscattered material that is re-deposited on the substrate, upon irradiation at fluences close to the melting threshold, is composed of a thin film intermixed with extremely small nanoparticles. Further irradiation promotes film clustering and nanoparticle formation. In the presence of cones, the nanoparticles become aligned into straight and long (~1 mm) lines whose spacing is close to the laser wavelength. This result suggested an ordering mechanism similar to that occurring for laser-induced periodic surface structures. The relation between nanoparticle line spacing and angle of incidence of the radiation supported this similarity. Nanoparticle ordering also was promoted by laser-enhanced chemical vapor deposition (LCVD) using polarized light, when a laser-induced periodic surface nanostructure was present in the substrate.

Paper Details

Date Published: 17 October 2003
PDF: 12 pages
Proc. SPIE 4977, Photon Processing in Microelectronics and Photonics II, (17 October 2003); doi: 10.1117/12.479532
Show Author Affiliations
Anthony J. Pedraza, Univ. of Tennessee/Knoxville (United States)
Jason D Fowlkes, Univ. of Tennessee/Knoxville (United States)
Stephen Jesse, Univ. of Tennessee/Knoxville (United States)
Yingfeng Guan, Univ. of Tennessee/Knoxville (United States)

Published in SPIE Proceedings Vol. 4977:
Photon Processing in Microelectronics and Photonics II
Alberto Piqué; David B. Geohegan; Friedrich G. Bachmann; Koji Sugioka; Frank Träger; Jan J. Dubowski; Peter R. Herman; Willem Hoving; Kouichi Murakami; Kunihiko Washio; Jim Fieret, Editor(s)

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