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Proceedings Paper

Femtosecond laser machining of steel
Author(s): Michelle L. Griffith; Mark T. Ensz; Daryl E. Reckaway
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Paper Abstract

Femtosecond laser processing is a promising new technology for the fabrication of micro-scale components from engineering materials, such as metals. In the femtosecond time regime, the ablation process is nearly a solid to vapor transition, thereby providing access to cut smaller features. Sandia National Laboratories has constructed a femtosecond laser microfabrication system to study the ability to produce microscale components in metals and glasses. In this paper, we will report on our initial studies to understand the metal ablation process with respect to manufacturing process parameters. With this understanding, we will show that femtosecond laser processing can fabricate complex components with fine feature detail and clean surfaces. A key finding in this work is the substantial effect of layer decrement on resulting recast material deposition when processing in air.

Paper Details

Date Published: 17 October 2003
PDF: 5 pages
Proc. SPIE 4977, Photon Processing in Microelectronics and Photonics II, (17 October 2003); doi: 10.1117/12.479229
Show Author Affiliations
Michelle L. Griffith, Sandia National Labs. (United States)
Mark T. Ensz, Sandia National Labs. (United States)
Daryl E. Reckaway, Sandia National Labs. (United States)

Published in SPIE Proceedings Vol. 4977:
Photon Processing in Microelectronics and Photonics II
Alberto Piqué; David B. Geohegan; Friedrich G. Bachmann; Koji Sugioka; Frank Träger; Jan J. Dubowski; Peter R. Herman; Willem Hoving; Kouichi Murakami; Kunihiko Washio; Jim Fieret, Editor(s)

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