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Proceedings Paper

Design of reflective relay for soft x-ray lithography
Author(s): J. Michael Rodgers; Tanya E. Jewell
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Paper Abstract

An all-reflective unobscured flat-field low-distortion telecentric optical design has been developed for non-scanning reduction soft x-ray lithography application. 1. 0

Paper Details

Date Published: 1 January 1991
PDF: 7 pages
Proc. SPIE 1354, 1990 Intl Lens Design Conf, (1 January 1991); doi: 10.1117/12.47916
Show Author Affiliations
J. Michael Rodgers, Optical Research Associates (United States)
Tanya E. Jewell, AT&T Bell Labs. (United States)


Published in SPIE Proceedings Vol. 1354:
1990 Intl Lens Design Conf
George N. Lawrence, Editor(s)

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