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Proceedings Paper

Application of melt ejection criterion in simulation of micromachining with laser
Author(s): Vladimir V. Semak; J. T. Schriempf; G. A. Knorovsky; D. O. MacCallum
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Paper Abstract

The theoretical criterion defining the threshold pulse energy and beam intensity required for melt ejection is proposed. The results of numerical simulation present dependencies of the threshold pulse energy and beam intensity as functions of laser pulse duration and beam radius. The experimental verification of proposed criterion is described and the comparison of theoretical predictions and measurements is presented. The criterion is applied for simulation of laser drilling metal foil with thickness in the range 25 μm - 125 μm using laser beam with 12 μm beam radius and pulse durations 10 ns and 100 ns. The computational results are used to interpret the results of experimental study of laser drilling of 125 μm aluminum foil using a single mode beam of a XeCl laser performed at the Nederlands Centrum voor Laser Research (NCLR) and the University of Twente. Additional results on Nd:YAG spot welds in pure Ni are also presented.

Paper Details

Date Published: 17 October 2003
PDF: 12 pages
Proc. SPIE 4977, Photon Processing in Microelectronics and Photonics II, (17 October 2003); doi: 10.1117/12.478610
Show Author Affiliations
Vladimir V. Semak, The Pennsylvania State Univ. (United States)
J. T. Schriempf, The Pennsylvania State Univ. (United States)
G. A. Knorovsky, Sandia National Labs. (United States)
D. O. MacCallum, Sandia National Labs. (United States)

Published in SPIE Proceedings Vol. 4977:
Photon Processing in Microelectronics and Photonics II
Alberto Piqué; David B. Geohegan; Friedrich G. Bachmann; Koji Sugioka; Frank Träger; Jan J. Dubowski; Peter R. Herman; Willem Hoving; Kouichi Murakami; Kunihiko Washio; Jim Fieret, Editor(s)

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