Industrial manufacturing with the aid of laser technology has found many applications in the microelectronics industry during the last three decades. At Philips the main application fields are laser spot welding and marking. Several novel fields are strongly coming up due to the high demands in the microelectronics and (flat) display industry that cannot be met with conventional technologies. In this paper we give an overview of the present status of laser technology in electronics manufacturing and of innovative developments for new applications in microelectronics and photonics.

Date Published: 17 October 2003
PDF: 10 pages
Proc. SPIE 4977, Photon Processing in Microelectronics and Photonics II, (17 October 2003); doi: 10.1117/12.478607

Published in SPIE Proceedings Vol. 4977:
Photon Processing in Microelectronics and Photonics II
Alberto Piqué; David B. Geohegan; Friedrich G. Bachmann; Koji Sugioka; Frank Träger; Jan J. Dubowski; Peter R. Herman; Willem Hoving; Kouichi Murakami; Kunihiko Washio; Jim Fieret, Editor(s)