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Proceedings Paper

Borosilicate-glass-based x-ray masks for LIGA microfabrication
Author(s): Yohannes M. Desta; Martin Bednarzik; Michael D. Bryant; Jost Goettert; Linke Jian; Yoonyoung Jin; Daejong Kim; Sanghoon Lee; Bernd Loechel; Hans-Ulrich Scheunemann; Zhengchun Peng
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Paper Abstract

During the past few years, graphite based X-ray masks have been in use at CAMD and BESSY to build a variety of high aspect ratio microstructures and devices where low side wall surface roughness is not needed In order to obtain lower sidewall surface roughness while maintaining the ease of fabrication of the graphite based X-ray masks, the use of borosilicate glass was explored. A borosilicate glass manufactured by Schott Glas (Mainz, Germany) was selected due to its high purity and availability in ultra-thin sheets (30 μm). The fabrication process of the X-ray masks involves the mounting of a 30 μm glass sheet to either a stainless steel ring at room temperature or an invar ring at an elevated temperature followed by resist application, lithography, and gold electroplating. A stress free membrane is obtained by mounting the thin glass sheet to a stainless steel ring, while mounting on an invar ring at an elevated temperature produces a pre-stressed membrane ensuring that the membrane will remain taut during X-ray exposure. X-ray masks have been produced by using both thick negative- and positive-tone photoresists. The membrane mounting, resist application, lithography, and gold electroplating processes have been optimized to yield X-ray masks with absorber thicknesses ranging from 10 μm to 25 μm. Poly(methyl methacrylate) layers of 100 μm to 400 μm have been successfully patterned using the glass membrane masks.

Paper Details

Date Published: 15 January 2003
PDF: 9 pages
Proc. SPIE 4979, Micromachining and Microfabrication Process Technology VIII, (15 January 2003); doi: 10.1117/12.478258
Show Author Affiliations
Yohannes M. Desta, Louisiana State Univ. (United States)
Martin Bednarzik, BESSY GmbH (Germany)
Michael D. Bryant, Univ. of Texas at Austin (United States)
Jost Goettert, Louisiana State Univ. (United States)
Linke Jian, BESSY GmbH (Germany)
Yoonyoung Jin, Louisiana State Univ. (United States)
Daejong Kim, Univ. of Texas at Austin (United States)
Sanghoon Lee, Univ. of Texas at Austin (United States)
Bernd Loechel, BESSY GmbH (Germany)
Hans-Ulrich Scheunemann, BESSY GmbH (Germany)
Zhengchun Peng, Louisiana State Univ. (United States)

Published in SPIE Proceedings Vol. 4979:
Micromachining and Microfabrication Process Technology VIII
John A. Yasaitis; Mary Ann Perez-Maher; Jean Michel Karam, Editor(s)

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