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Proceedings Paper

MEMS spatial light modulators with integrated electronics
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Paper Abstract

The design, fabrication, and preliminary test results of a microelectromechanical, micromachined spatial light modulator (μSLM) with complementary metal-oxide semiconductor (CMOS) electronics, for control of optical phase is presented in this paper. An array of 32×32 piston-motion MEMS mirror segments make up the μSLM. Each mirror segment will be capable of altering the phase of reflected light by up to one wavelength for infrared illumination (? = 1.5 μm). The mirror segments are fabricated from metal in a low temperature process allowing for vertical integration of the μSLM with CMOS based, multi-bit, control electronics. The surface of the CMOS is planarized to facilitate μSLM-CMOS integration. The fabrication process and process development results, test results, including frequency response and electromechanical characterization of the (μSLM) actuators, will be presented.

Paper Details

Date Published: 20 January 2003
PDF: 11 pages
Proc. SPIE 4983, MOEMS and Miniaturized Systems III, (20 January 2003); doi: 10.1117/12.477931
Show Author Affiliations
Thomas Becker, Boston Univ. (United States)
Thomas G. Bifano, Boston Univ. (United States)
Hocheol Lee, Boston Univ. (United States)
Michele Miller, Michigan Technological Univ. (United States)
Paul A. Bierden, Boston Micromachines Corp. (United States)
Steven Cornelissen, Boston Micromachines Corp. (United States)

Published in SPIE Proceedings Vol. 4983:
MOEMS and Miniaturized Systems III
James H. Smith, Editor(s)

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