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Proceedings Paper

Atomic layer growth of zinc oxide and zinc sulphide
Author(s): Brian W. Sanders; Adrian H. Kitai
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Paper Abstract

Zinc oxide and zinc suiphide thin films form electrode and phosphor layers in flat panel electroluminescent displays. Zinc suiphide and transparent conducting zinc oxide films have been deposited using a modified chemical vapour deposition technique which also allows for the preparation of a new mixed (ZnO1 s) host material for phosphor applications. The films have been characterized by optical transmission electron microscopy Rutherford Backscattering Hall measurements and x-ray diffraction. 2.

Paper Details

Date Published: 1 April 1991
PDF: 7 pages
Proc. SPIE 1398, CAN-AM Eastern '90, (1 April 1991); doi: 10.1117/12.47783
Show Author Affiliations
Brian W. Sanders, McMaster Univ. (Canada)
Adrian H. Kitai, McMaster Univ. (Canada)

Published in SPIE Proceedings Vol. 1398:
CAN-AM Eastern '90

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