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Proceedings Paper

Fabrication of low-loss optical waveguides using a novel photosensitive polyimide
Author(s): Kazunori Mune; Ryusuke Naito; Takashi Fukuoka; Amane Mochizuki; Kenji Matsumoto; Nasuhi Yurt; Gerald R. Meredith; Ghassan E. Jabbour; Nasser Peyghambarian
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Paper Abstract

Fabrication of optical waveguides by a simple patterning process using photosensitive polyimide (PSPI) is described. Light waveguide based on PSPI was fabricated by photolithographic processing without use of dry etching process. The PSPI varnish is comprised of polyamic acid (PAA) which was made from fluorinated diamine and fluorinated tetracarboxylic dianhydride, and photosensitizer. The PSPI has the following characteristics: glass transition temperature (Tg) of 330 °C, coefficient of thermal expansion of 40 ppm/K. Moreover the PSPI is colorless, and posses low absorption at 1 .3 and 1 .55im. The sidewalls and the surfaces ofthe fabricated waveguide are very smooth, which is essential for the low loss optical mode propagation and lower scattering of the mode due to the imperfections. Single and multimode buried ridge waveguides on quartz glass substrate were fabricated and tested. Optical propagation losses were measured by standard cut back method and found to be as low as 0.4 dB/cm @ 1.55 jim. This fabrication process would be expected to contribute to low cost production for high performance opto-electronic devices.

Paper Details

Date Published: 30 May 2003
PDF: 6 pages
Proc. SPIE 4997, Photonics Packaging and Integration III, (30 May 2003); doi: 10.1117/12.475449
Show Author Affiliations
Kazunori Mune, Nitto Denko Co., Ltd. (Japan)
Ryusuke Naito, Nitto Denko Co., Ltd. (Japan)
Takashi Fukuoka, Nitto Denko Co., Ltd. (Japan)
Amane Mochizuki, Nitto Denko Co., Ltd. (Japan)
Kenji Matsumoto, Nitto Denko Technical Corp. (United States)
Nasuhi Yurt, Optical Sciences Ctr./Univ. of Arizona (United States)
Gerald R. Meredith, Optical Sciences Ctr./Univ. of Arizona (United States)
Ghassan E. Jabbour, Optical Sciences Ctr./Univ. of Arizona (United States)
Nasser Peyghambarian, Optical Sciences Ctr./Univ. of Arizona (United States)

Published in SPIE Proceedings Vol. 4997:
Photonics Packaging and Integration III
Randy A. Heyler; David J. Robbins; Ghassan E. Jabbour, Editor(s)

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