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Proceedings Paper

Preisach model for quantifying hysteresis in an atomic force microscope
Author(s): Ralph C. Smith; Murti V. Salapaka; Luke Cherveny
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Paper Abstract

Atomic force microscopes employ stacked or cylindrical piezoceramic actuators to achieve sub-angstrom resolution. While these devices produce excellent set-point accuracy, they exhibit hysteresis and constitutive nonlinearities even at low drive levels. Feedback mechanisms can mitigate the deleterious effects of these nonlinearities for low frequency operation but such techniques fail at higher frequencies due to increased noise to signal ratios. In this paper, we quantify the hysteresis and constitutive nonlinearities through a Preisach model. As illustrated through a comparison with experimental data, this provides a characterization which is sufficiently accurate for inclusion as an inverse compensator in various control designs.

Paper Details

Date Published: 10 July 2002
PDF: 7 pages
Proc. SPIE 4693, Smart Structures and Materials 2002: Modeling, Signal Processing, and Control, (10 July 2002); doi: 10.1117/12.475245
Show Author Affiliations
Ralph C. Smith, North Carolina State Univ. (United States)
Murti V. Salapaka, Iowa State Univ. (United States)
Luke Cherveny, North Carolina State Univ. (United States)

Published in SPIE Proceedings Vol. 4693:
Smart Structures and Materials 2002: Modeling, Signal Processing, and Control
Vittal S. Rao, Editor(s)

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