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Proceedings Paper

Electrostatically actuated membrane mirrors for adaptive optics
Author(s): Peter Kurczynski; Gregory R. Bogart; Warren Y-C. Lai; Victor Lifton; William M. Mansfield; J. Anthony Tyson; Bernard Sadoulet; David R. Williams
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Paper Abstract

We are developing membrane mirrors for use in adaptive optics, particularly in astronomy and vision science. We have micro-fabricated membrane mirrors from single crystal silicon using wet chemical etching and reactive ion etching. Membrane size, tension and operating voltage were selected to allow greater deformation of the mirror surface at low operating voltage than previous membrane mirror designs. Mirror devices consist of independently fabricated membrane and electrode array chips that are flip chip bonded together. We have fabricated electrode arrays with 256 and 1024 electrodes, and active diameters ranging from 6-10 mm (comparable to the size of the human pupil). Membrane-electrode hybrids are mounted to ceramic packages, wire bonded, and driven by off chip, D/A electronics. These devices are milestones in the development of an electret membrane mirror.

Paper Details

Date Published: 20 January 2003
PDF: 9 pages
Proc. SPIE 4983, MOEMS and Miniaturized Systems III, (20 January 2003); doi: 10.1117/12.473642
Show Author Affiliations
Peter Kurczynski, Lucent Technologies/Bell Labs. (United States)
Univ. of California/Berkeley (United States)
Gregory R. Bogart, Agere Systems/Bell Labs. (United States)
Warren Y-C. Lai, Lucent Technologies/Bell Labs. (United States)
New Jersey Nanotechnology Consortium (United States)
Victor Lifton, Lucent Technologies/Bell Labs. (United States)
William M. Mansfield, Lucent Technologies/Bell Labs. (United States)
New Jersey Nanotechnology Consortium (United States)
J. Anthony Tyson, Lucent Technologies/Bell Labs. (United States)
Bernard Sadoulet, Univ. of California/Berkeley (United States)
David R. Williams, Univ. of Rochester (United States)

Published in SPIE Proceedings Vol. 4983:
MOEMS and Miniaturized Systems III
James H. Smith, Editor(s)

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