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Proceedings Paper

In-process measurements of material removal in fluid jet polishing
Author(s): Hedser H. van Brug; Mietta Groeneveld; Silvia M. Booij; Joseph J. M. Braat
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Paper Abstract

A prototype of a system for in-process monitoring of material removal in fluid jet polishing (FJP) is presented. The measurements make use of temporal phase unwrapping (TPU) allowing for a large working range. The measurement system will be discussed, with all problems that had to be overcome like water on the surface and vibrations, as well as the FJP system. The basics behind TPU will be presented and the first results will be shown. Finally, the capabilities of the system will be discussed. The presented system enables the in-process monitoring of the footprint as obtained by the FJP technique and measurement of the material removal rate.

Paper Details

Date Published: 19 June 2002
PDF: 8 pages
Proc. SPIE 4778, Interferometry XI: Applications, (19 June 2002); doi: 10.1117/12.473566
Show Author Affiliations
Hedser H. van Brug, TNO (Netherlands)
Mietta Groeneveld, Technische Univ. Delft (Netherlands)
Silvia M. Booij, Technische Univ. Delft (Netherlands)
Joseph J. M. Braat, Technische Univ. Delft (Netherlands)

Published in SPIE Proceedings Vol. 4778:
Interferometry XI: Applications
Wolfgang Osten, Editor(s)

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