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Proceedings Paper

High-precision 2D-angle measurement interferometer
Author(s): Zongtao Ge; Mitsuo Takeda
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Paper Abstract

Fourier transform method and phase shift method are widely used to analyze fringe patterns to obtain surface profiles. In these ordinary fringe analysis methods, tilt or angle in the measured surface is often cancelled by certain operations. On the other hand, tilt can be considered as part of the measured surface, and obtained by fitting the measured surface profile with a line or plane. Therefore, we proposed a high-precision angle measurement method using fringe analysis techniques. In this paper, a 2-dimensional angular measurement interferometer is constructed to realize the proposed method, and the output curve of the measurement system is calibrated using a high-resolution autocollimator and a PZT driven lever system as the references. Fringe patterns obtained by the experiments are analyzed by both of the Fourier transform method and phase shift method, and the experimental results are compared with each other. Furthermore, the characteristics of the measurement system, including stability, resolution, and accuracy are evaluated and analyzed. Experiments verified that it could achieve both a wide measurement range of over +/- 2160 arcsec (+/- 0.6Degree) and a high angular resolution of 0.01 arcsec, simultaneously.

Paper Details

Date Published: 19 June 2002
PDF: 11 pages
Proc. SPIE 4778, Interferometry XI: Applications, (19 June 2002); doi: 10.1117/12.473545
Show Author Affiliations
Zongtao Ge, Fuji Photo Optical Co., Ltd. (Japan)
Mitsuo Takeda, Univ. of Electro-Communications (Japan)

Published in SPIE Proceedings Vol. 4778:
Interferometry XI: Applications
Wolfgang Osten, Editor(s)

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