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Proceedings Paper

Spectroscopic ellipsometry measurements with the Grating Division-of-Amplitude Photopolarimeter
Author(s): Paul C. Nordine; D. Scott Hampton; Shankar Krishnan
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Paper Abstract

The Grating Division-of-Amplitude Photopolarimeter (G-DOAP) obtains very rapid measurements of the complete polarization state of light over the spectral bandwidth of the instrument. Application to polarimetry, ellipsometry, and Mueller matrix ellipsometry is discussed. The use of MME is illustrated by measurements and analysis of the depolarization produced by reflection at a thick oxide-coated silicon wafer.

Paper Details

Date Published: 16 July 2002
PDF: 7 pages
Proc. SPIE 4689, Metrology, Inspection, and Process Control for Microlithography XVI, (16 July 2002); doi: 10.1117/12.473449
Show Author Affiliations
Paul C. Nordine, Containerless Research, Inc. (United States)
D. Scott Hampton, Containerless Research, Inc. (United States)
Shankar Krishnan, Containerless Research, Inc. (United States)

Published in SPIE Proceedings Vol. 4689:
Metrology, Inspection, and Process Control for Microlithography XVI
Daniel J. C. Herr, Editor(s)

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