Proceedings Paper
Surface-micromachined tunneling-based accelerometer| Format | Member Price | Non-Member Price |
|---|---|---|
| $17.00 | $21.00 |
Paper Abstract
A surface-micro-machined tunneling-based accelerometer has been designed. A simpler fabrication process has been proposed and illustrated. Performance optimization has been tried by tuning the tunneling tip, beam and proof-mass design.
Paper Details
Date Published: 16 January 2003
PDF: 4 pages
Proc. SPIE 4981, MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication II, (16 January 2003); doi: 10.1117/12.472877
Published in SPIE Proceedings Vol. 4981:
MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication II
Siegfried W. Janson, Editor(s)
PDF: 4 pages
Proc. SPIE 4981, MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication II, (16 January 2003); doi: 10.1117/12.472877
Show Author Affiliations
Runzi Chang, Univ. of California/Berkeley (United States)
Min She, Univ. of California/Berkeley (United States)
Published in SPIE Proceedings Vol. 4981:
MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication II
Siegfried W. Janson, Editor(s)
© SPIE. Terms of Use
