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Proceedings Paper

Cyclotene diaphragm for MEMS-based IR detectors
Author(s): Shuwen Guo
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Paper Abstract

A novel structure employing Dow Chemical (Midland, MI) benzocyclobutene (BCB) Cyclotene as a diaphragm material is presented in this report. The main advantages of this BCB diaphragm are its low thermal conductivity, robustness, chemical inertness, low curing temperature and high structure yield. Moreover, a BCB film can be either photo-defined or plasma etched and is a suitable micromachining material for post IC processing. Micromachined IR thermopile single detectors and lineal detector arrays (1×16), using BiSeTeSb/BiSbTe sensing elements on BCB diaphragms, have been constructed and tested. Up to 100% structure yield has been obtained. The process used to realize this detector structure is compatible with the eventual inclusion of on-chip circuitry for signal amplification and conditioning.

Paper Details

Date Published: 15 January 2003
PDF: 8 pages
Proc. SPIE 4979, Micromachining and Microfabrication Process Technology VIII, (15 January 2003); doi: 10.1117/12.472808
Show Author Affiliations
Shuwen Guo, Goodrich Corp. (United States)

Published in SPIE Proceedings Vol. 4979:
Micromachining and Microfabrication Process Technology VIII
John A. Yasaitis; Mary Ann Perez-Maher; Jean Michel Karam, Editor(s)

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