Share Email Print

Proceedings Paper

Strain sensor development
Author(s): Kevin B. McKenney; Shoko Yoshikawa; Marco Giovanardi
Format Member Price Non-Member Price
PDF $17.00 $21.00

Paper Abstract

The application of PZN-PT single crystal piezoceramic in low-cost, high-resolution strain sensors was examined using an ACX QuickPack PZT strain sensor as a basis for the new design, with active structural control of precision machinery as the target application. A study was performed to determine the influence of mechanical feedthrough on the sensor signal. Mechanical feedthrough appears when an actuator is close to the sensor and near-field effects dominate the actuator-to-sensor transfer function. Both voltage follower and charge amplifier signal conditioning electronics were tested, and the benefits of each on the nonlinear characteristics of PZT and PZN-PT were analyzed. Finally, the coherence between the sensor characteristics was analyzed. The results show that the QuickPack strain sensor compares favorably with some higher cost off-the-shelf products in terms of noise and resolution, at a significantly lower cost. The single crystal sensors show significantly higher sensitivity than their conventional multi-crystalline counterparts, though less than expected due to the softer base material.

Paper Details

Date Published: 27 June 2002
PDF: 13 pages
Proc. SPIE 4694, Smart Structures and Materials 2002: Smart Sensor Technology and Measurement Systems, (27 June 2002); doi: 10.1117/12.472643
Show Author Affiliations
Kevin B. McKenney, Cymer, Inc. (United States)
Shoko Yoshikawa, Cymer, Inc. (United States)
Marco Giovanardi, Cymer, Inc. (United States)

Published in SPIE Proceedings Vol. 4694:
Smart Structures and Materials 2002: Smart Sensor Technology and Measurement Systems
Daniele Inaudi; Eric Udd, Editor(s)

© SPIE. Terms of Use
Back to Top