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Proceedings Paper

Lithography: a historical perspective and shape of things to come
Author(s): Syed A. Rizvi
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Paper Abstract

This paper takes a look at the evolution of lithography during the last 50 years and projects its future beyond the era of Next Generation Lithography (NGL). The technologies beyond NGL will require a paradigm shift from the way things are done today. Many new disciplines and processes will emerge that will need to be integrated into existing systems and procedures.

Paper Details

Date Published: 1 July 2002
PDF: 8 pages
Proc. SPIE 4688, Emerging Lithographic Technologies VI, (1 July 2002); doi: 10.1117/12.472355
Show Author Affiliations
Syed A. Rizvi, Semiconductor Education and Consulting Services (United States)

Published in SPIE Proceedings Vol. 4688:
Emerging Lithographic Technologies VI
Roxann L. Engelstad, Editor(s)

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