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Proceedings Paper

New developments in ALFT soft x-ray point sources
Author(s): Dario F. Cintron; Xiaoming Guo; Meisheng Xu; Rubin Ye; Yuriy Antoshko; Steve Drew; Albert Philippe; Emilio Panarella
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Paper Abstract

The new development in ALFT soft X-ray point source VSX-400 consists mainly of an improvement of the nozzle design to reduce the source size, as well as the introduction of a novel trigger system, capable of triggering the discharge hundreds of million of times without failure, and a debris removal system. Continuous operation for 8 hours at 20 kHz allows us to achieve 400 mW of useful soft X-ray radiation around 1 nm wavelength. In another regime of operation with a high energy machine, the VSX-Z, we have been able to achieve consistently 10 J of X-rays per pulse at a repetition rate that can reach 1 Hz with an input electrical energy of approximately 3 kJ and an efficiency in excess of 10-3.

Paper Details

Date Published: 1 July 2002
PDF: 8 pages
Proc. SPIE 4688, Emerging Lithographic Technologies VI, (1 July 2002); doi: 10.1117/12.472354
Show Author Affiliations
Dario F. Cintron, ALFT Inc. (Canada)
Xiaoming Guo, ALFT Inc. (Canada)
Meisheng Xu, ALFT Inc. (Canada)
Rubin Ye, ALFT, Inc. (Canada)
Yuriy Antoshko, ALFT Inc. (Canada)
Steve Drew, ALFT Inc. (Canada)
Albert Philippe, ALFT Inc. (Canada)
Emilio Panarella, ALFT Inc. (Canada)

Published in SPIE Proceedings Vol. 4688:
Emerging Lithographic Technologies VI
Roxann L. Engelstad, Editor(s)

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