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Proceedings Paper

Roll-to-roll manufacturing of thin film electronics
Author(s): James R. Sheats
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Paper Abstract

The development and current status of roll-to-roll manufacturing processes and equipment relevant to the fabrication of patterned, active electronic devices such as thin film transistors (TFTs) is reviewed, along with a survey of the knowledge of processing for thin film electronics on flexible (especially polymer) substrates. It is concluded that while there are a number of unknowns and engineering challenges, there is no fundamental obstacle to the implementation of such processes, which will have profound value in production cost and product characteristics. The first amorphous silicon TFT made with roll-to-roll processing is reported.

Paper Details

Date Published: 1 July 2002
PDF: 9 pages
Proc. SPIE 4688, Emerging Lithographic Technologies VI, (1 July 2002); doi: 10.1117/12.472297
Show Author Affiliations
James R. Sheats, Rolltronics Corp. (United States)

Published in SPIE Proceedings Vol. 4688:
Emerging Lithographic Technologies VI
Roxann L. Engelstad, Editor(s)

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