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Proceedings Paper

Scaling method using laser inteference for microdisplacement measurement system
Author(s): Xiaojin Zhu; Xinmin Qi; Yiqing Gao; Lihua Yuan
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Paper Abstract

The accuracy of the micro-displacement feed detection and control is decided by the calibration of the system. On the basis of laser interference principle, a new scaling method is introduced. Combining hardware subdivision and software subdivision, the scaling system can calibrate the micro-displacement effectively. The scaling system is composed of optical interferometer, signal processing circuits and microprocessor. Experiments proved that it is feasible to rectify the micro-displacement system with laser interference. The resolution of the micro-displacement is better than 0.1 micron after it was revised.

Paper Details

Date Published: 20 September 2002
PDF: 5 pages
Proc. SPIE 4927, Optical Design and Testing, (20 September 2002); doi: 10.1117/12.471709
Show Author Affiliations
Xiaojin Zhu, Nanchang Institute of Aeronautical Technology (China)
Xinmin Qi, Nanchang Institute of Aeronautical Technology (China)
Yiqing Gao, Nanchang Institute of Aeronautical Technology (China)
Lihua Yuan, Nanchang Institute of Aeronautical Technology (China)

Published in SPIE Proceedings Vol. 4927:
Optical Design and Testing
Zhicheng Weng; Jose M. Sasian; Yongtian Wang, Editor(s)

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